1. Overview of Equipment and Application Fields

The desktop resistive evaporation coating system is a highly integrated compact vacuum coating device, specifically designed for laboratory environments in universities, research institutes, and corporate R&D centers. Utilizing the principle of resistive heating, this equipment enables the evaporation and deposition of coating materials, widely applied in the preparation of metal films (e.g., gold, silver, aluminum, chromium), alloy films, and certain low-melting-point dielectric films. Its compact size allows it to be placed independently on a workbench or even stored in a glove box for operation, perfectly meeting the special preparation requirements for water-and oxygen-sensitive materials. It serves as an ideal tool for nanomaterial research, microelectronic device fabrication, and optical thin film experiments.

2. Core Functional Highlights

· The three-source switching evaporation system is equipped with three independent water-cooled resistance evaporation sources, with anti-contamination plates installed between the sources to prevent cross-contamination. Users can flexibly switch between different evaporation sources via the control system to achieve continuous deposition of multiple materials or alloy film preparation, significantly enhancing experimental efficiency.

· High-precision film thickness monitoring is achieved through the imported Inficon SQM-160 quartz crystal oscillator system, paired with a single water-cooled probe, delivering a control accuracy of 0.1A. The system continuously monitors deposition rate and total thickness, ensuring precise controllability and high repeatability of thin film parameters.

· The intelligent PLC touch control system employs a PLC + touchscreen smart control system with a user-friendly interface and simple operation. The system features advanced functions such as self-diagnosis and alerts for air leaks, self-diagnosis and maintenance prompts for communication failures, reducing equipment maintenance difficulty and ensuring experimental safety.

· Flexible sample stage configuration

o Rotation feature: The sample stage speed is adjustable from 0 to 20 rpm, effectively improving the uniformity of large-area coating.

o Optional heating: The substrate stage can be equipped with heating functionality, capable of reaching a maximum temperature of 300±1℃, to meet substrate heat treatment requirements under specific processes.

o Removable design: The sample holder measures 60×60mm and features a detachable structure for quick sample replacement and easy cleaning maintenance.

· The high-efficiency vacuum acquisition system employs a combination of a mechanical pump (TRP-12) and a Pfeiffer molecular pump (Hipace80), coupled with a GDC-25b electromagnetic baffle valve, ensuring robust pumping speed. It achieves atmospheric pumping to 8×10⁻⁴ Pa in ≤30 minutes, with an ultimate vacuum degree of up to 8.0×10⁻⁵ Pa, providing a pristine environment for high-quality film formation.

3. Technical Parameters and Specifications

4. Why choose the desktop resistance thermal evaporation coating machine?

This desktop resistive evaporation coating system achieves the perfect balance of high performance and compact design. Its glovebox-compatible architecture effectively addresses challenges in sensitive material preparation, while Inficon's precision thickness control and three-source switching system ensure both professional rigor and operational flexibility. The intelligent PLC control system simplifies operation to an unprecedented level, enabling even beginners to master the process quickly. For laboratories with limited space but high demands for film quality, this system stands as the optimal solution to enhance research efficiency and reduce operational costs.